MARLBOROUGH, Mass.— Qualtré, Inc is introducing the QGYR330H MEMS gyroscopes, fully integrated three-axis angular rate sensors targeting industrial applications, based on Qualtré’s patented Bulk Acoustic Wave (BAW) MEMS technology. The new gyros are manufactured using the highly versatile High Aspect-Ratio Poly and Single-crystalline Silicon (HARPSS™) fabrication process, which allows unprecedented combination of robustness, performance, and size advantages over conventional MEMS tuning-fork gyroscopes. Samples of the QGYR330H devices are now available in a small LGA32 package that is RoHS and green compliant.
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When selecting a MEMS gyroscope, systems engineers and application developers focus on a few key performance parameters. The most common include device sensitivity and bias stability. Sensitivity is important because it refers to the projected output of the device to a certain input rotation. Bias stability, however, has been long considered the “gold standard” specification for gyros and describes the resolution floor of the gyroscope and thereby specifies the detection limitations. The bias of a vibratory gyroscope is the average output recorded from the gyroscope when it is not undergoing any rotation. It is often referred to as the Zero Rate Output (ZRO) and is typically expressed in units of deg/hr or deg/s. Bias stability measurement describes how the bias of the gyroscope may change over a specific period of time under fixed conditions (i.e. constant temperature and pressure).