Next Generation Applications Need Next Generation
MEMS Gyro Technology
Environmental Robustness of Qualtré’s Gyroscopes
Demonstrating Qualtré’s Superior Gyroscope
Qualtré's highly differentiated and patented sensors and sensor intellectual property are based on disruptive, next generation Bulk Acoustic Wave (BAW) sensor design and HARPSS process innovations that transcend the capabilities of conventional inertial sensors. By combining high-frequency BAW resonant structures with the HARPSS™ fabrication process, Qualtré's gyroscopes deliver a new level of price/performance and provide improved environmental tolerance and reliability, making our sensor technology extremely versatile to meet the demands of a broad range of applications.
Bulk-Acoustic Wave (BAW) Sensors
Unlike conventional tuning-fork gyroscopes, Qualtré's BAW sensors utilize high-frequency degenerate modes to detect rotation-rate signals. This technology has the following inherent benefits:
HARPSS™ Fabrication Process
At the core of Qualtré's technology is the high-aspect ratio combined poly- and single-crystal silicon (HARPSS™) fabrication process. Its unique features are what empower the unmatchable performance of BAW sensors. HARPSS™ capacitive nano-gaps (< 200 nm) provide extremely high electromechanical transduction, a key parameter in the implementation of highly sensitive, low-noise sensors.
Qualtre's HARPSS process enables the development of an entire family of MEMS devices.
HARPSS Manufacturing Process Flexible, Efficient, Scalable
Free White Paper. Motion Sensing Technology. The simplicity of the Bulk Acoustic Wave gyroscope sensor design belies the benefits it will deliver for motion sensing in mobile devices. Learn more