Next Generation Applications Need Next Generation
MEMS Gyro Technology

Environmental Robustness of Qualtré’s Gyroscopes

Demonstrating Qualtré’s Superior Gyroscope

Qualtré's highly differentiated and patented sensors and sensor intellectual property are based on disruptive, next generation Bulk Acoustic Wave (BAW) sensor design and HARPSS process innovations that transcend the capabilities of conventional inertial sensors. By combining high-frequency BAW resonant structures with the HARPSS™ fabrication process, Qualtré's gyroscopes deliver a new level of price/performance and provide improved environmental tolerance and reliability, making our sensor technology extremely versatile to meet the demands of a broad range of applications.

Next Generation Applications Need Next Generation MEMS Gyro Technology

Bulk-Acoustic Wave (BAW) Sensors

Unlike conventional tuning-fork gyroscopes, Qualtré's BAW sensors utilize high-frequency degenerate modes to detect rotation-rate signals. This technology has the following inherent benefits:

  • Industrial grade bias instability (Low Drift)
    Accurate location-awareness and navigation.
  • Widest dynamic range
    Enables a wide range of detectable signals for many applications.
  • Best-in-class noise density
    Improves resolution for even more accurate measurements.
  • Exceptional immunity to shock and vibration
    Essential for automotive and industrial applications.
  • Scalable in size
    Can be optimized for the price/performance demands of specific applications.

Bulk-Acoustic Wave (BAW) Sensors

HARPSS™ Fabrication Process

At the core of Qualtré's technology is the high-aspect ratio combined poly- and single-crystal silicon (HARPSS™) fabrication process. Its unique features are what empower the unmatchable performance of BAW sensors. HARPSS™ capacitive nano-gaps (< 200 nm) provide extremely high electromechanical transduction, a key parameter in the implementation of highly sensitive, low-noise sensors.

HARPSS™ Fabrication Process

Qualtre's HARPSS process enables the development of an entire family of MEMS devices.

HARPSS Manufacturing Process Flexible, Efficient, Scalable

Free White Paper. Motion Sensing Technology. The simplicity of the Bulk Acoustic Wave gyroscope sensor design belies the benefits it will deliver for motion sensing in mobile devices. Learn more

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